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1 Ergebnisse
1
The effect mechanism of electron irradiation on MEMS comb-t..:
, In:
2023 24th International Conference on Electronic Packaging Technology (ICEPT)
,
Zhao, Xuewei
;
Li, Nannan
;
Wang, Lijuan
... - p. 1-5 , 2023
Link:
https://doi.org/10.1109/ICEPT59018.2023.10492419
RT T1
2023 24th International Conference on Electronic Packaging Technology (ICEPT)
: T1
The effect mechanism of electron irradiation on MEMS comb-type capacitive accelerometer
UL https://suche.suub.uni-bremen.de/peid=ieee-10492419&Exemplar=1&LAN=DE A1 Zhao, Xuewei A1 Li, Nannan A1 Wang, Lijuan A1 Song, Jianmin A1 Wang, Zhenkai A1 Xing, Chaoyang YR 2023 SN 2836-9734 K1 Accelerometers K1 Micromechanical devices K1 Silicon compounds K1 Resistance K1 Radiation effects K1 Glass K1 Silicon K1 MEMS accelerometer K1 resonant accelerometers K1 reliability K1 irradiation effect SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ICEPT59018.2023.10492419 DO https://doi.org/10.1109/ICEPT59018.2023.10492419 SF ELIB - SuUB Bremen
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