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A Micro-hotplate for MEMS Gas Sensor Wafer Level Packaging:

, In: 2023 24th International Conference on Electronic Packaging Technology (ICEPT),
Zhang, Zhaohua ; Zhao, Xuewei ; Wang, Deyan.. - p. 1-4 , 2023
Link: https://doi.org/10.1109/ICEPT59018.2023.10492441