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1 Ergebnisse
1
Strength Differences of Lateral, Top and Bottom Surface in ..:
, In:
2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Cozzi, Sara
;
Martini, Roberto
;
Coppo, Francesco
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/INERTIAL60399.2024.10502054
RT T1 <cTitle>2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)</cTitle>: T1 <Title>Strength Differences of Lateral, Top and Bottom Surface in Monocrystalline Silicon Micromachining</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10502054&Exemplar=1&LAN=DE A1 Cozzi, Sara A1 Martini, Roberto A1 Coppo, Francesco A1 Langfelder, Giacomo A1 Belloni, Edoardo A1 Dellea, Stefano A1 Coronato, Luca YR 2024 SN 2377-3480 K1 Temperature sensors K1 Temperature distribution K1 Inertial sensors K1 Micromachining K1 Sensor phenomena and characterization K1 Silicon K1 Noise measurement K1 inertial sensors K1 silicon strength K1 fatigue K1 MEMS K1 surfaces K1 sidewalls SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL60399.2024.10502054 DO https://doi.org/10.1109/INERTIAL60399.2024.10502054 SF ELIB - SuUB Bremen
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