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1 Ergebnisse
1
Active Probe Card for Multi-Parameter Fast Characterization..:
, In:
2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Zhao, Yang
;
Shi, Qin
;
Xia, Guoming
.. - p. 1-4 , 2024
Link:
https://doi.org/10.1109/INERTIAL60399.2024.10502062
RT T1 <cTitle>2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)</cTitle>: T1 <Title>Active Probe Card for Multi-Parameter Fast Characterization of Mems Gyroscope at Wafer-Level</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10502062&Exemplar=1&LAN=DE A1 Zhao, Yang A1 Shi, Qin A1 Xia, Guoming A1 Huang, Jinyang A1 Qiu, Anping YR 2024 SN 2377-3480 K1 Micromechanical devices K1 Resistance K1 Q-factor K1 Process monitoring K1 Performance evaluation K1 Inertial sensors K1 Packaging K1 active probe card K1 MEMS gyroscope K1 wafer-level characterization K1 northfinding SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL60399.2024.10502062 DO https://doi.org/10.1109/INERTIAL60399.2024.10502062 SF ELIB - SuUB Bremen
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