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Simulation-based approach in design of low stress Bowl-shap..:
, In:
2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Zhang, Yinan
;
Zhou, Bin
;
Zhang, Ruixue
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/INERTIAL60399.2024.10502080
RT T1 <cTitle>2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)</cTitle>: T1 <Title>Simulation-based approach in design of low stress Bowl-shaped Micro Hemispherical Resonators</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10502080&Exemplar=1&LAN=DE A1 Zhang, Yinan A1 Zhou, Bin A1 Zhang, Ruixue A1 Gu, Haoyu A1 Wei, Qi A1 Zhang, Rong YR 2024 SN 2377-3480 K1 Semiconductor device modeling K1 Geometry K1 Fabrication K1 Analytical models K1 Three-dimensional displays K1 Cooling K1 Internal stresses K1 Finite Element Analysis K1 Precision Molding Process K1 Bowl-shaped Micro Hemispherical Resonators K1 low stress SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL60399.2024.10502080 DO https://doi.org/10.1109/INERTIAL60399.2024.10502080 SF ELIB - SuUB Bremen
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