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1 Ergebnisse
1
Advancement in the Mems Gyroscope from a Vibrating Tuning F..:
, In:
2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Forke, Roman
;
Tsukamoto, Takashiro
;
Shaporin, Alexey
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/INERTIAL60399.2024.10502098
RT T1 <cTitle>2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)</cTitle>: T1 <Title>Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10502098&Exemplar=1&LAN=DE A1 Forke, Roman A1 Tsukamoto, Takashiro A1 Shaporin, Alexey A1 Weidlich, Sebastian A1 Bulz, Daniel A1 Hahn, Susann A1 Tanaka, Shuji A1 Hiller, Karla YR 2024 SN 2377-3480 K1 Vibrations K1 Structural rings K1 Micromechanical devices K1 Electrodes K1 Sensitivity K1 Inertial sensors K1 Gyroscopes K1 MEMS K1 ring gyroscope K1 angular rate K1 sensor K1 FM mode K1 BDRIE K1 cavity-SOI K1 HAR SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL60399.2024.10502098 DO https://doi.org/10.1109/INERTIAL60399.2024.10502098 SF ELIB - SuUB Bremen
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