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1 Ergebnisse
1
Coupling Reactor-scale and Feature-Scale Simulations: Proce..:
, In:
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Sathiyanarayanan, Rajesh
;
Namsani, Sadanandam
;
Meher, Kailash
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/EDTM58488.2024.10511654
RT T1 <cTitle>2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Coupling Reactor-scale and Feature-Scale Simulations: ProcessTwin™ for Unit Processes</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10511654&Exemplar=1&LAN=DE A1 Sathiyanarayanan, Rajesh A1 Namsani, Sadanandam A1 Meher, Kailash A1 Shivakumar, Gowdra Thippeswamy A1 Roy, Abhra A1 Stout, Phillip A1 Xu, Yi A1 Lei, Yu A1 Lei, Wei YR 2024 K1 Semiconductor device modeling K1 Geometry K1 Couplings K1 Silicon compounds K1 Tungsten K1 Data models K1 Space exploration K1 Reactor-scale simulations K1 Feature-scale simulations K1 CFD-ACE+ K1 CFD-TOPO K1 Process Twin™ SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM58488.2024.10511654 DO https://doi.org/10.1109/EDTM58488.2024.10511654 SF ELIB - SuUB Bremen
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