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1 Ergebnisse
1
Fabrication of Miniaturized Pressure Sensors for Invasive P..:
, In:
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
C, Linet Thomas
;
Nithin
;
Bhat, K N
.. - p. 1-3 , 2024
Link:
https://doi.org/10.1109/EDTM58488.2024.10511779
RT T1 <cTitle>2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Fabrication of Miniaturized Pressure Sensors for Invasive Pressure Measurements</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10511779&Exemplar=1&LAN=DE A1 C, Linet Thomas A1 Nithin A1 Bhat, K N A1 Nayak, M M A1 Bhat, Navakanta YR 2024 K1 Pressure sensors K1 Resistors K1 Micromechanical devices K1 Fabrication K1 Pediatrics K1 Sensitivity K1 Reliability engineering K1 MEMS K1 pressure sensor K1 piezo resistor SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM58488.2024.10511779 DO https://doi.org/10.1109/EDTM58488.2024.10511779 SF ELIB - SuUB Bremen
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