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1 Ergebnisse
1
ComputLitho – An Indigenous Optical Lithography Simulator w..:
, In:
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Kumar, Pardeep
;
Joshi, Tanmay
;
Joglekar, Radhika
. - p. 1-3 , 2024
Link:
https://doi.org/10.1109/EDTM58488.2024.10511904
RT T1 <cTitle>2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>ComputLitho – An Indigenous Optical Lithography Simulator with Novel Features</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10511904&Exemplar=1&LAN=DE A1 Kumar, Pardeep A1 Joshi, Tanmay A1 Joglekar, Radhika A1 Mohapatra, Nihar R. YR 2024 K1 Semiconductor device modeling K1 Visualization K1 Computational modeling K1 Lithography K1 Optical device fabrication K1 Optical imaging K1 Prediction algorithms K1 Optical Lithography Simulator K1 Aerial Image K1 Resist Image K1 OPC K1 Hotspot K1 Mask Optimization SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM58488.2024.10511904 DO https://doi.org/10.1109/EDTM58488.2024.10511904 SF ELIB - SuUB Bremen
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