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Electrothermal analysis of a simple MEMS Pirani Gauge with ..:
, In:
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Kumari, Ashwini
;
Garg, Manu
;
Kumar, Piyush
. - p. 1-3 , 2024
Link:
https://doi.org/10.1109/EDTM58488.2024.10512343
RT T1 <cTitle>2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Electrothermal analysis of a simple MEMS Pirani Gauge with a lower detection limit</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10512343&Exemplar=1&LAN=DE A1 Kumari, Ashwini A1 Garg, Manu A1 Kumar, Piyush A1 Singh, Pushpapraj YR 2024 K1 Micromechanical devices K1 Performance evaluation K1 Sensitivity K1 Power demand K1 Dynamic range K1 Microcavities K1 Finite element analysis K1 MEMS K1 Pirani gauge K1 Vacuum pressure sensor SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/EDTM58488.2024.10512343 DO https://doi.org/10.1109/EDTM58488.2024.10512343 SF ELIB - SuUB Bremen
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