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1 Ergebnisse
1
Rapid MOSFET threshold voltage testing for high throughput ..:
, In:
2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS)
,
Herman, Michael H.
;
Nguyen, Trenton T.
;
Wong, Ken
.. - p. 1-6 , 2024
Link:
https://doi.org/10.1109/ICMTS59902.2024.10520252
RT T1 <cTitle>2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS)</cTitle>: T1 <Title>Rapid MOSFET threshold voltage testing for high throughput semiconductor process monitoring</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10520252&Exemplar=1&LAN=DE A1 Herman, Michael H. A1 Nguyen, Trenton T. A1 Wong, Ken A1 Johnson, Jeff A1 Morris, Ben YR 2024 SN 2158-1029 K1 Process monitoring K1 Semiconductor device measurement K1 MOSFET K1 Voltage measurement K1 Throughput K1 Threshold voltage K1 Microelectronics K1 Test time reduction K1 MOS devices K1 parameter extraction K1 threshold voltage extraction SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ICMTS59902.2024.10520252 DO https://doi.org/10.1109/ICMTS59902.2024.10520252 SF ELIB - SuUB Bremen
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