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Electrical behavior of ALD-molybdenum films in the thin-fil..:
, In:
2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS)
,
van der Zouw, Kees
;
Dulfer, Simone D.
;
Aarnink, Antonius A.I.
. - p. 1-6 , 2024
Link:
https://doi.org/10.1109/ICMTS59902.2024.10520676
RT T1
2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS)
: T1
Electrical behavior of ALD-molybdenum films in the thin-film limit
UL https://suche.suub.uni-bremen.de/peid=ieee-10520676&Exemplar=1&LAN=DE A1 van der Zouw, Kees A1 Dulfer, Simone D. A1 Aarnink, Antonius A.I. A1 Kovalgin, Alexey Y. YR 2024 SN 2158-1029 K1 Resistance K1 Temperature dependence K1 Temperature K1 Power transmission lines K1 Films K1 Metals K1 Conductivity SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ICMTS59902.2024.10520676 DO https://doi.org/10.1109/ICMTS59902.2024.10520676 SF ELIB - SuUB Bremen
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