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1 Ergebnisse
1
A Unified Physics-Based Stochastic Model for EM-Induced Res..:
, In:
2024 IEEE International Reliability Physics Symposium (IRPS)
,
Sukharev, V.
;
Choy, J.-H.
;
Kteyan, A.
... - p. 1-10 , 2024
Link:
https://doi.org/10.1109/IRPS48228.2024.10529301
RT T1 <cTitle>2024 IEEE International Reliability Physics Symposium (IRPS)</cTitle>: T1 <Title>A Unified Physics-Based Stochastic Model for EM-Induced Resistance Degradation in BEoL Interconnect Segments</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10529301&Exemplar=1&LAN=DE A1 Sukharev, V. A1 Choy, J.-H. A1 Kteyan, A. A1 Shuster-Passage, J. A1 Choi, S. A1 Gall, M. YR 2024 SN 1938-1891 K1 Geometry K1 Temperature measurement K1 Resistance K1 Atomic measurements K1 Degradation K1 Stochastic processes K1 Electrical resistance measurement K1 Electromigration K1 diffusion K1 mechanical stress K1 voiding K1 MTF K1 stochasticity SP 1 OP 10 LK http://dx.doi.org/https://doi.org/10.1109/IRPS48228.2024.10529301 DO https://doi.org/10.1109/IRPS48228.2024.10529301 SF ELIB - SuUB Bremen
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