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1 Ergebnisse
1
BEOL tip-to-tip dielectric reliability characterization usi..:
, In:
2024 IEEE International Reliability Physics Symposium (IRPS)
,
Fang, Y.
;
Lesniewska, A.
;
Ciofi, I.
... - p. 1-7 , 2024
Link:
https://doi.org/10.1109/IRPS48228.2024.10529311
RT T1 <cTitle>2024 IEEE International Reliability Physics Symposium (IRPS)</cTitle>: T1 <Title>BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10529311&Exemplar=1&LAN=DE A1 Fang, Y. A1 Lesniewska, A. A1 Ciofi, I. A1 Roussel, Ph. A1 Wu, C. A1 Vega-Gonzalez, V. A1 De Wolf, I. A1 Croes, K. YR 2024 SN 1938-1891 K1 Electric breakdown K1 Metals K1 Very large scale integration K1 Reliability engineering K1 Dielectrics K1 Reliability K1 Stress K1 Barrierless Ru K1 BEOL K1 conduction mechanisms K1 dielectric scaling K1 reliability K1 TDDB SP 1 OP 7 LK http://dx.doi.org/https://doi.org/10.1109/IRPS48228.2024.10529311 DO https://doi.org/10.1109/IRPS48228.2024.10529311 SF ELIB - SuUB Bremen
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