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1 Ergebnisse
1
A Systematic Study of HCI Improvement in FinFET with Source..:
, In:
2024 IEEE International Reliability Physics Symposium (IRPS)
,
Ranjan, Rakesh
;
Perepa, Pavitra R.
;
Lee, Ki-Don
... - p. 5A.1-1-5A.1-6 , 2024
Link:
https://doi.org/10.1109/IRPS48228.2024.10529365
RT T1
2024 IEEE International Reliability Physics Symposium (IRPS)
: T1
A Systematic Study of HCI Improvement in FinFET with Source/Drain Implant and Geometry Modulation
UL https://suche.suub.uni-bremen.de/peid=ieee-10529365&Exemplar=1&LAN=DE A1 Ranjan, Rakesh A1 Perepa, Pavitra R. A1 Lee, Ki-Don A1 Jha, Ashish K. A1 Sahoo, Kartika C. A1 Sanders, Kayla N. A1 Moeller, Robert A1 Sharma, Prateek A1 Kang, Minhyo A1 Kim, Peter A1 Song, Kwanjae A1 Jeon, Yongwoo A1 Kim, Seungho A1 Shim, Hyewon A1 Chung, Shinyoung A1 Kim, Ju Kwang YR 2024 SN 1938-1891 K1 Geometry K1 Degradation K1 Systematics K1 Three-dimensional displays K1 Modulation K1 Implants K1 Voltage K1 Dose K1 Energy K1 HCI K1 S/D Implant Tilt Angle SP 5A.1 OP 1-5A.1-6 LK http://dx.doi.org/https://doi.org/10.1109/IRPS48228.2024.10529365 DO https://doi.org/10.1109/IRPS48228.2024.10529365 SF ELIB - SuUB Bremen
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