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1 Ergebnisse
1
Light-Assisted Investigation of the Role of Oxygen Flow dur..:
, In:
2024 IEEE International Reliability Physics Symposium (IRPS)
,
Rinaudo, Pietro
;
Chasin, Adrian
;
Zhao, Ying
... - p. 1-6 , 2024
Link:
https://doi.org/10.1109/IRPS48228.2024.10529432
RT T1 <cTitle>2024 IEEE International Reliability Physics Symposium (IRPS)</cTitle>: T1 <Title>Light-Assisted Investigation of the Role of Oxygen Flow during IGZO Deposition on Deep Subgap States and their Evolution Under PBTI</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10529432&Exemplar=1&LAN=DE A1 Rinaudo, Pietro A1 Chasin, Adrian A1 Zhao, Ying A1 Kaczer, Ben A1 Rassoul, Nouredine A1 Dekkers, Harold F.W. A1 van Setten, Michiel J. A1 Belmonte, Attilio A1 De Wolf, Ingrid A1 Kar, Gouri A1 Franco, Jacopo YR 2024 SN 1938-1891 K1 Temperature measurement K1 Correlation K1 Films K1 Distortion K1 Time factors K1 Reliability K1 Stress K1 IGZO K1 PBTI K1 hydrogen doping K1 deep DOS states SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/IRPS48228.2024.10529432 DO https://doi.org/10.1109/IRPS48228.2024.10529432 SF ELIB - SuUB Bremen
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