Titel

Merkliste
1 Ergebnisse

Characterization and Multiscale Modeling of TDDB in State-o..:

, In: 2024 IEEE International Reliability Physics Symposium (IRPS),

Palmieri, Andrea ; Tavakoli, Mahdi ; Ching, Chi... - p. 10A.3-1-10A.3-6 , 2024

Link: https://doi.org/10.1109/IRPS48228.2024.10529483

RT 
T1 <cTitle>2024 IEEE International Reliability Physics Symposium (IRPS)</cTitle>: T1 <Title>Characterization and Multiscale Modeling of TDDB in State-of-the-art BEOL</Title>

UL https://suche.suub.uni-bremen.de/peid=ieee-10529483&Exemplar=1&LAN=DE
				
A1 Palmieri, Andrea
A1 Tavakoli, Mahdi
A1 Ching, Chi
A1 Zheng, Wenkai
A1 You, Shi
A1 Zhang, Xiaodong
A1 Cornigli, Davide
A1 Haverty, Michael
A1 Singh, Navneet
A1 Larcher, Luca
A1 Jamieson, Monika
A1 Bhatnagar, Ajay
A1 Jansen, Alexander
A1 Gage, Max
A1 Tang, Jianshe
A1 Deshpande, Sameer
A1 Brown, Brian
A1 Srivatsa, Arun
A1 Naik, Mehul
A1 Xie, Bo
A1 Gelatos, Jerry
A1 Lee, Joung Joo
A1 Tang, Xianmin
A1 Thareja, Gaurav
A1 Pesic, Milan
YR 2024
SN 1938-1891
K1 Degradation
K1 Band structures
K1 Correlation
K1 Films
K1 Metrology
K1 Dielectrics
K1 Dielectric breakdown
K1 BEOL
K1 process integration
K1 metallization
K1 time-dependent dielectric breakdown (TDDB)
SP 10A.3
OP 1-10A.3-6
LK http://dx.doi.org/https://doi.org/10.1109/IRPS48228.2024.10529483
DO https://doi.org/10.1109/IRPS48228.2024.10529483
SF ELIB - SuUB Bremen

Export

RefWorks (nur Desktop-Version!)
Flow (Zuerst in Flow einloggen, dann importieren)