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1 Ergebnisse
1
The Formation of Air Gaps Isolation Used in Metal/Dielectri..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Qin, Weidu
;
Sun, Jiabao
;
Tian, Chao
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531832
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>The Formation of Air Gaps Isolation Used in Metal/Dielectric Stacking</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10531832&Exemplar=1&LAN=DE A1 Qin, Weidu A1 Sun, Jiabao A1 Tian, Chao A1 Liu, Tielu A1 Zhang, Xin A1 Sun, Hongbo A1 Zhao, Chao YR 2024 K1 Resistors K1 Radio frequency K1 Three-dimensional displays K1 Air gaps K1 Stacking K1 Capacitors K1 Random access memory K1 Silicon Oxide K1 PETEOS K1 Air Gaps K1 IMD SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531832 DO https://doi.org/10.1109/CSTIC61820.2024.10531832 SF ELIB - SuUB Bremen
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