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1 Ergebnisse
1
Ion Beam Shaping as a Solution for Ultra-High Precision Pla..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Guo, Lei
;
Yang, Yuxin
;
Sun, Fang
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531869
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Ion Beam Shaping as a Solution for Ultra-High Precision Planarization Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10531869&Exemplar=1&LAN=DE A1 Guo, Lei A1 Yang, Yuxin A1 Sun, Fang A1 Zheng, Zhiyuan A1 Wei, Xiaoxiu A1 Liang, Feng A1 Li, Cheng A1 Cui, Hushan A1 Hu, Dongdong A1 Chen, Lu A1 Xu, Kaidong YR 2024 K1 Planarization K1 Atomic beams K1 Loading K1 Gallium arsenide K1 Process control K1 Surface roughness K1 Nanoscale devices K1 Ion beam shaping K1 global planarization K1 atomic level K1 wafer level thickness K1 high process stability SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531869 DO https://doi.org/10.1109/CSTIC61820.2024.10531869 SF ELIB - SuUB Bremen
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