I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Study on 28NM Technology Node ILD0-CMP Micro_Scratch Defect..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Ma, Xing
;
Wang, Kailin
;
Yu, Jianwen
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531876
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Study on 28NM Technology Node ILD0-CMP Micro_Scratch Defect Reduction</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10531876&Exemplar=1&LAN=DE A1 Ma, Xing A1 Wang, Kailin A1 Yu, Jianwen A1 Que, Yurong A1 Li, Hu A1 Fang, Jingxun A1 Zhang, Yu YR 2024 K1 Integrated circuits K1 Planarization K1 Metals K1 Logic gates K1 Dielectric films K1 High-k dielectric materials K1 Optimization SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531876 DO https://doi.org/10.1109/CSTIC61820.2024.10531876 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
