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1 Ergebnisse
1
Calculation Method of Target Erosion in the Planar DC Magne..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Ding, Jihua
;
Dong, Yanchao
;
Xia, Wei
.. - p. 1-2 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531931
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Calculation Method of Target Erosion in the Planar DC Magnetron Sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10531931&Exemplar=1&LAN=DE A1 Ding, Jihua A1 Dong, Yanchao A1 Xia, Wei A1 Bai, Xiabing A1 Yang, Yujie YR 2024 K1 Integrated circuits K1 Magnetic field measurement K1 Probability K1 Size measurement K1 Plasmas K1 Magnetic fields K1 Sputtering SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531931 DO https://doi.org/10.1109/CSTIC61820.2024.10531931 SF ELIB - SuUB Bremen
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