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1 Ergebnisse
1
Virtual Measurement Combine OCD and FDC Through Optimized R..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Yang, Qingyun
;
Meng, Michael
;
Zheng, Alex
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531947
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Virtual Measurement Combine OCD and FDC Through Optimized Random Forest Machine Learning Algorithm Assists on Post Etching Monitor</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10531947&Exemplar=1&LAN=DE A1 Yang, Qingyun A1 Meng, Michael A1 Zheng, Alex A1 Lin, Paul A1 Gai, Kevin A1 Chen, Osim YR 2024 K1 Semiconductor device measurement K1 Process control K1 Predictive models K1 Metrology K1 Prediction algorithms K1 Etching K1 Data models K1 Virtual Measurement(VM) K1 Machine Learning (ML) K1 Random Forest(RF) K1 OCD K1 FDC SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531947 DO https://doi.org/10.1109/CSTIC61820.2024.10531947 SF ELIB - SuUB Bremen
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