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High Aspect Ratio Carbon Hard Mask Etch Process for Profile..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Zhu, Meng-Jiao ; Xu, Li-Tian ; Zeng, Li.. - p. 1-3 , 2024
Link: https://doi.org/10.1109/CSTIC61820.2024.10531956