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1 Ergebnisse
1
A Fully Automated VPD System for Noble Metal Control During..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Huang, Qiao
;
Cui, Hushan
;
Zou, Zhiwen
... - p. 1-04 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531961
RT T1
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
: T1
A Fully Automated VPD System for Noble Metal Control During CIS Manufacturing
UL https://suche.suub.uni-bremen.de/peid=ieee-10531961&Exemplar=1&LAN=DE A1 Huang, Qiao A1 Cui, Hushan A1 Zou, Zhiwen A1 Cheng, Shiran A1 Zhu, Lei A1 Zhang, Hao A1 Xue, Chaobo A1 Feng, Jiali A1 Hua, Qiang A1 Zhu, Xiaoqing A1 Liu, Wuping A1 Xu, Kaidong YR 2024 K1 Gold K1 Silver K1 Surface contamination K1 Semiconductor devices K1 Metals K1 Mass spectroscopy K1 Plasmas K1 Vapor Phase Decomposition (VPD) K1 Noble metal contamination K1 Aqua Regia K1 Inductively Coupled Plasma Mass Spectroscopy (ICP-MS) K1 CMOS image sensor (CIS) SP 1 OP 04 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531961 DO https://doi.org/10.1109/CSTIC61820.2024.10531961 SF ELIB - SuUB Bremen
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