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1 Ergebnisse
1
Producer-GT ™ High Productivity CCP ETCH Solution:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Tong, Xipeng
;
Ge, Qiang
- p. 1-2 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531983
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Producer-GT ™ High Productivity CCP ETCH Solution</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10531983&Exemplar=1&LAN=DE A1 Tong, Xipeng A1 Ge, Qiang YR 2024 K1 Productivity K1 Resistance K1 Radio frequency K1 Integrated circuits K1 Costs K1 Corrosion K1 Throughput K1 Producer-GT™ K1 High productivity K1 Etch SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531983 DO https://doi.org/10.1109/CSTIC61820.2024.10531983 SF ELIB - SuUB Bremen
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