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1 Ergebnisse
1
Study on the Slurry for Chemical Mechanical Polishing of Ga..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Liu, Yang
;
Zhang, Baoguo
;
Qin, Sihui
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10531991
RT T1
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
: T1
Study on the Slurry for Chemical Mechanical Polishing of GaN Wafer
UL https://suche.suub.uni-bremen.de/peid=ieee-10531991&Exemplar=1&LAN=DE A1 Liu, Yang A1 Zhang, Baoguo A1 Qin, Sihui A1 Wang, Yijun A1 Xian, Wenhao A1 Liu, Min A1 Cui, Dexing YR 2024 K1 Integrated circuits K1 Additives K1 Surface roughness K1 Oxidation K1 Rough surfaces K1 Gallium nitride K1 Task analysis SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10531991 DO https://doi.org/10.1109/CSTIC61820.2024.10531991 SF ELIB - SuUB Bremen
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