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1 Ergebnisse
1
Correlation Between CD/LWR and Focus Level Fitting Error: A..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Huang, Tianhao
;
Liu, Pan
;
Chen, Zeyang
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532003
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Correlation Between CD/LWR and Focus Level Fitting Error: A Process Quality Indicator</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532003&Exemplar=1&LAN=DE A1 Huang, Tianhao A1 Liu, Pan A1 Chen, Zeyang A1 Li, Sheng A1 Gao, Dawei A1 Zhou, Guodong YR 2024 K1 Integrated circuits K1 Correlation K1 Fitting K1 Measurement uncertainty K1 Lithography K1 Resists K1 Production K1 CD K1 LWR K1 CD uniformity K1 focus level fitting error K1 process quality SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532003 DO https://doi.org/10.1109/CSTIC61820.2024.10532003 SF ELIB - SuUB Bremen
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