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1 Ergebnisse
1
SoC Profile Control for BEOL Tri-Layer Patterning Scheme:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Xu, Xingxing.
;
Zhou, Hexin
;
Li, Quanbao.
.. - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532004
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>SoC Profile Control for BEOL Tri-Layer Patterning Scheme</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532004&Exemplar=1&LAN=DE A1 Xu, Xingxing. A1 Zhou, Hexin A1 Li, Quanbao. A1 Liu, Ya-Ming. A1 Huang, Jian. YR 2024 K1 Integrated circuits K1 Gases K1 Chemistry K1 Process control K1 Resists K1 Aerospace electronics K1 Etching K1 Tri-layer patterning K1 SOC K1 vertical profile K1 BEOL SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532004 DO https://doi.org/10.1109/CSTIC61820.2024.10532004 SF ELIB - SuUB Bremen
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