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1 Ergebnisse
1
Incoming Impact on Dishing Improvement in FEOL Process:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Du, Huize
;
Liu, Shubin
;
Yang, Yu
... - p. 1-6 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532019
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Incoming Impact on Dishing Improvement in FEOL Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532019&Exemplar=1&LAN=DE A1 Du, Huize A1 Liu, Shubin A1 Yang, Yu A1 Li, Hu A1 Bao, Yu A1 Fang, Jingxun A1 Zhang, Yu YR 2024 K1 Integrated circuits K1 Integrated circuit technology K1 Annealing K1 Planarization K1 Ion implantation K1 Films K1 Voltage SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532019 DO https://doi.org/10.1109/CSTIC61820.2024.10532019 SF ELIB - SuUB Bremen
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