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1 Ergebnisse
1
Effect of Green Corrosion Inhibitors on the Performance of ..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
He, Chao
;
Niu, Xinhuan
;
Yan, Han
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532038
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Effect of Green Corrosion Inhibitors on the Performance of Copper-Cobalt CMP</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532038&Exemplar=1&LAN=DE A1 He, Chao A1 Niu, Xinhuan A1 Yan, Han A1 Liu, Jianghao A1 Dong, Changxin A1 Li, Xinjie YR 2024 K1 Corrosion inhibitors K1 Corrosion K1 Green products K1 Integrated circuit interconnections K1 Copper K1 Compounds K1 Cobalt K1 Corrosion inhibitor K1 Hypoxanthine K1 Sarcosine K1 Ratio of Copper/Cobalt removal rate K1 step height K1 Chemical Mechanical polishing (CMP) SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532038 DO https://doi.org/10.1109/CSTIC61820.2024.10532038 SF ELIB - SuUB Bremen
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