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1 Ergebnisse
1
Spectra Machine Learning for the Prediction of Sheet Resist..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Zheng, Alex
;
Meng, Michael
;
Li, Shang
.. - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532061
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Spectra Machine Learning for the Prediction of Sheet Resistance and Capacity</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532061&Exemplar=1&LAN=DE A1 Zheng, Alex A1 Meng, Michael A1 Li, Shang A1 Gai, Kevin A1 Chen, Osim YR 2024 K1 Resistance K1 Training K1 Optical feedback K1 Process control K1 Metals K1 Machine learning K1 Geometrical optics K1 Machine Learning K1 Optical Spectra K1 Electric Performance K1 Sheet Resistance K1 Capacity K1 Prediction K1 In-situ K1 Non-destructive SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532061 DO https://doi.org/10.1109/CSTIC61820.2024.10532061 SF ELIB - SuUB Bremen
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