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Nucleation and Growth Study of Al2O3 Film Fabricated Throug..:

, In: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC),
Li, Wang ; Hu, Jiacheng ; Wen, Di.. - p. 1-4 , 2024
Link: https://doi.org/10.1109/CSTIC61820.2024.10532080