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1 Ergebnisse
1
Challenges of Semiconductor Micro Via Fabrication Technolog..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Morikawa, Yasuhiro
- p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532090
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Challenges of Semiconductor Micro Via Fabrication Technology for 3D Chiplet Interconnect</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532090&Exemplar=1&LAN=DE A1 Morikawa, Yasuhiro YR 2024 K1 Semiconductor device modeling K1 Three-dimensional displays K1 Manufacturing processes K1 Moore's Law K1 Microfabrication K1 Bridge circuits K1 Integrated circuit interconnections SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532090 DO https://doi.org/10.1109/CSTIC61820.2024.10532090 SF ELIB - SuUB Bremen
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