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1 Ergebnisse
1
Yield Improvement in 4X Node Technology ETOX NOR Flash by O..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Du, Yihang
;
Gu, Lin
;
Chen, Hualun
.. - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532096
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Yield Improvement in 4X Node Technology ETOX NOR Flash by Optimizing Control Gate Related Process and Design</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532096&Exemplar=1&LAN=DE A1 Du, Yihang A1 Gu, Lin A1 Chen, Hualun A1 Wang, Zhuangzhuang A1 Yao, Chun YR 2024 K1 Integrated circuits K1 Bridge circuits K1 Process control K1 Logic gates K1 Etching K1 Optimization K1 Antireflection coatings K1 Control gate K1 Word line bridge K1 Yield improvement K1 BARC over etching K1 Design SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532096 DO https://doi.org/10.1109/CSTIC61820.2024.10532096 SF ELIB - SuUB Bremen
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