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1 Ergebnisse
1
A New Multi-Mode X-Ray Fluorescence Apparatus for Both Blan..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Huang, Yuxiang
;
Li, Xujun
;
Feng, Yinqiao
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532104
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>A New Multi-Mode X-Ray Fluorescence Apparatus for Both Blanket and Pattern Wafer Film Metrology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532104&Exemplar=1&LAN=DE A1 Huang, Yuxiang A1 Li, Xujun A1 Feng, Yinqiao A1 Luo, Ronghui A1 Chen, Zhijun A1 Wong, Trina A1 Hong, Feng A1 Chan, Athena YR 2024 K1 Resistance K1 Spectroscopy K1 Instruments K1 Metals K1 Process control K1 Metrology K1 Optical variables measurement SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532104 DO https://doi.org/10.1109/CSTIC61820.2024.10532104 SF ELIB - SuUB Bremen
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