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1 Ergebnisse
1
Ultra-Deep via Etching of Silicon Oxide for High-Voltage Ca..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Xia, Yuyan
;
Qiu, Jia
;
Zheng, Fuqiang
.. - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532106
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Ultra-Deep via Etching of Silicon Oxide for High-Voltage Capacitive Isolators</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532106&Exemplar=1&LAN=DE A1 Xia, Yuyan A1 Qiu, Jia A1 Zheng, Fuqiang A1 Zhou, Luhao A1 Tao, Ran YR 2024 K1 Integrated circuits K1 Isolators K1 High-voltage techniques K1 Silicon nitride K1 Etching K1 Silicon K1 Dielectrics K1 oxide K1 etch K1 ultra-deep via K1 mask material K1 mask thickness SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532106 DO https://doi.org/10.1109/CSTIC61820.2024.10532106 SF ELIB - SuUB Bremen
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