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1 Ergebnisse
1
STI Gap-Filling Performance Improvement by the Process Inte..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Wang, Zhuangzhuang
;
Chen, Hualun
;
Gu, Lin
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532114
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>STI Gap-Filling Performance Improvement by the Process Integration Optimization in the 4XNM ETOX NOR Flash</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532114&Exemplar=1&LAN=DE A1 Wang, Zhuangzhuang A1 Chen, Hualun A1 Gu, Lin A1 Du, Yihang A1 Yao, Chun A1 Zhu, Zhen YR 2024 K1 Integrated circuits K1 Filling K1 Plasmas K1 Probes K1 Optimization K1 Periodic structures K1 ETOX Nor Flash K1 STI gap-fill K1 Process integration K1 SIN pullback K1 HDP SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532114 DO https://doi.org/10.1109/CSTIC61820.2024.10532114 SF ELIB - SuUB Bremen
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