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1 Ergebnisse
1
Precise Etching Technique of Ultra-Thin Al2O3 Film Using BC..:
, In:
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
,
Tian, Cheng
;
Xu, Litian
;
Li, Yuhao
. - p. 1-2 , 2024
Link:
https://doi.org/10.1109/CSTIC61820.2024.10532117
RT T1 <cTitle>2024 Conference of Science and Technology for Integrated Circuits (CSTIC)</cTitle>: T1 <Title>Precise Etching Technique of Ultra-Thin Al2O3 Film Using BCl3 Chemistry</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10532117&Exemplar=1&LAN=DE A1 Tian, Cheng A1 Xu, Litian A1 Li, Yuhao A1 Wang, Xuehua YR 2024 K1 Integrated circuits K1 Chemistry K1 Metals K1 Etching K1 Plasmas K1 Plasma temperature K1 Aluminum oxide K1 plasma etch K1 precise etch K1 aluminum oxide K1 aluminum fluoride K1 aluminum chloride K1 modification reaction K1 ligand exchange reaction SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC61820.2024.10532117 DO https://doi.org/10.1109/CSTIC61820.2024.10532117 SF ELIB - SuUB Bremen
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