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1 Ergebnisse
1
Investigation of Plasma Gases for Polysilazane Conversion i..:
, In:
2024 International Conference on Electronics Packaging (ICEP)
,
Nemoto, Daiki
;
Takeuchi, Kai
;
Higurashi, Eiji
- p. 289-290 , 2024
Link:
https://doi.org/10.23919/ICEP61562.2024.10535633
RT T1 <cTitle>2024 International Conference on Electronics Packaging (ICEP)</cTitle>: T1 <Title>Investigation of Plasma Gases for Polysilazane Conversion into SiO2 for Wafer Bonding</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10535633&Exemplar=1&LAN=DE A1 Nemoto, Daiki A1 Takeuchi, Kai A1 Higurashi, Eiji YR 2024 K1 Wafer bonding K1 Silicon compounds K1 Gases K1 Plasmas K1 Plasma temperature K1 Bonding K1 Electronics packaging K1 perhydropolysilazane K1 plasma K1 wafer bonding SP 289 OP 290 LK http://dx.doi.org/https://doi.org/10.23919/ICEP61562.2024.10535633 DO https://doi.org/10.23919/ICEP61562.2024.10535633 SF ELIB - SuUB Bremen
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