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1 Ergebnisse
1
Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled..:
, In:
2024 IEEE International Memory Workshop (IMW)
,
Rachidi, S.
;
Ramesh, S.
;
Tierno, D.
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/IMW59701.2024.10536954
RT T1
2024 IEEE International Memory Workshop (IMW)
: T1
Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash
UL https://suche.suub.uni-bremen.de/peid=ieee-10536954&Exemplar=1&LAN=DE A1 Rachidi, S. A1 Ramesh, S. A1 Tierno, D. A1 Donadio, G. L. A1 Pacco, A. A1 Maes, J. W. A1 Jeong, Y. A1 Arreghini, A. A1 Van Den Bosch, G. A1 Rosmeulen, M. YR 2024 SN 2573-7503 K1 Three-dimensional displays K1 Annealing K1 Metallization K1 Scalability K1 Logic gates K1 Conductivity K1 Hafnium compounds K1 3D NAND K1 Flash K1 z-pitch scaling K1 Memory K1 Molybdenum K1 HfO2 K1 Reliability SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IMW59701.2024.10536954 DO https://doi.org/10.1109/IMW59701.2024.10536954 SF ELIB - SuUB Bremen
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