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1 Ergebnisse
1
High-Q SAW Resonators Based on High-Crystallinity AlScN-AlN..:
, In:
2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)
,
Lin, Fuhong
;
Yang, Kai
;
Tao, Haoran
... - p. 137-140 , 2024
Link:
https://doi.org/10.1109/IC-MAM60575.2024.10539030
RT T1 <cTitle>2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)</cTitle>: T1 <Title>High-Q SAW Resonators Based on High-Crystallinity AlScN-AlN-Sapphire Substrate</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10539030&Exemplar=1&LAN=DE A1 Lin, Fuhong A1 Yang, Kai A1 Tao, Haoran A1 Wang, Qikun A1 Wu, Liang A1 Zuo, Chengjie YR 2024 K1 Q-factor K1 Analytical models K1 Surface acoustic waves K1 Scandium K1 Acoustic measurements K1 Finite element analysis K1 Resonators K1 SAW K1 composite substrate K1 AlScN K1 quality factor SP 137 OP 140 LK http://dx.doi.org/https://doi.org/10.1109/IC-MAM60575.2024.10539030 DO https://doi.org/10.1109/IC-MAM60575.2024.10539030 SF ELIB - SuUB Bremen
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