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1 Ergebnisse
1
Accelerating Chamber-to-Chamber Matching Using AI:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Pitz, Emil
;
Medina, Leandro
;
Chopra, Meghali
- p. 1-5 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545362
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Accelerating Chamber-to-Chamber Matching Using AI</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545362&Exemplar=1&LAN=DE A1 Pitz, Emil A1 Medina, Leandro A1 Chopra, Meghali YR 2024 SN 2376-6697 K1 Performance evaluation K1 Semiconductor device measurement K1 Costs K1 Three-dimensional displays K1 Semiconductor devices K1 Machine learning K1 Production K1 Tool Matching K1 Machine Learning K1 Metrology K1 Optimization K1 Optimal Process Parameters SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545362 DO https://doi.org/10.1109/ASMC61125.2024.10545362 SF ELIB - SuUB Bremen
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