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1
Cloud Big Data Lake for Advanced Analytics in Semiconductor..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Sun, Susan
;
Ye, Jeff
;
Schwarthoff, Hubert
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545365
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Cloud Big Data Lake for Advanced Analytics in Semiconductor Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545365&Exemplar=1&LAN=DE A1 Sun, Susan A1 Ye, Jeff A1 Schwarthoff, Hubert A1 Rosin, Jon A1 Vakkalagadda, Varalakshmi A1 Chang, Jimmy A1 Ubbara, Sesidhar Reddy A1 Chinthakindi, Anil YR 2024 SN 2376-6697 K1 Cloud computing K1 Soft sensors K1 Scalability K1 Machine learning K1 Lakes K1 Big Data K1 Semiconductor device manufacture K1 Cloud K1 Data Lake K1 Semiconductor Manufacturing K1 Big Data Analytics SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545365 DO https://doi.org/10.1109/ASMC61125.2024.10545365 SF ELIB - SuUB Bremen
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