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Study of Wafer Arcing Defects on PECVD Low Deposition Rate ..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Wang, Minrui ; Low, Irene ; Lee, YB. - p. 1-4 , 2024
Link: https://doi.org/10.1109/ASMC61125.2024.10545370