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1 Ergebnisse
1
Feedback Control in Station Dispatching to Improve Constrai..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Krishna, Murali
;
Kalmus, Michael
;
Madson, Robert A
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545440
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Feedback Control in Station Dispatching to Improve Constraint Tool Output in 300mm Fabs</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545440&Exemplar=1&LAN=DE A1 Krishna, Murali A1 Kalmus, Michael A1 Madson, Robert A A1 Mert, Arca A1 Mosgrove, David J A1 Trimeloni, Akanksha T A1 Merrill, Christopher J A1 Zhao, Zhili L YR 2024 SN 2376-6697 K1 Semiconductor device modeling K1 Reinforcement learning K1 Markov processes K1 Semiconductor device manufacture K1 Software K1 Feedback control K1 Manufacturing K1 Dispatching K1 Constraint optimization SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545440 DO https://doi.org/10.1109/ASMC61125.2024.10545440 SF ELIB - SuUB Bremen
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