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1 Ergebnisse
1
Elimination of Passivation RIE Arcing in RFSOI Process:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Ong, Shu Teik
;
Loh, Wai San
;
Li, Yong Hai
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545441
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Elimination of Passivation RIE Arcing in RFSOI Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545441&Exemplar=1&LAN=DE A1 Ong, Shu Teik A1 Loh, Wai San A1 Li, Yong Hai A1 Teng, Shi Rui A1 Goh, Ghit Guan A1 Venkataramani, Chandrasekar YR 2024 SN 2376-6697 K1 Radio frequency K1 Optical losses K1 Semiconductor lasers K1 Optical character recognition K1 Power lasers K1 Lithography K1 Production K1 PID K1 Arcing K1 SOI K1 Wafer ID K1 OCR K1 Al K1 RIE K1 OSAT K1 Laser Scribe SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545441 DO https://doi.org/10.1109/ASMC61125.2024.10545441 SF ELIB - SuUB Bremen
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