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1
Process Control Solutions for GaN-on-Si Devices in a Produc..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Carboni, Francesco F.
;
Perego, Luca M.
;
Czeppel, Laura T.
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545449
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Process Control Solutions for GaN-on-Si Devices in a Production Line</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545449&Exemplar=1&LAN=DE A1 Carboni, Francesco F. A1 Perego, Luca M. A1 Czeppel, Laura T. A1 Capelli, Daniele A1 Moio, Bruno A1 Adamo, Costanza A1 Bollin, Maddalena A1 Barbisan, Luca A1 Bellando, Francesco A1 Salamone, Matteo M. A1 Sharma, Parikshit A1 Parisi, Paolo A1 Deepak, Shruti A1 Dayyala, Manoj K. YR 2024 SN 2376-6697 K1 Economics K1 Reviews K1 Process control K1 Production K1 Inspection K1 Semiconductor device manufacture K1 Silicon K1 GaN on Si K1 HEMT K1 control plan K1 eBeam review K1 killer defect K1 wafer map metrics K1 pGaN residues SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545449 DO https://doi.org/10.1109/ASMC61125.2024.10545449 SF ELIB - SuUB Bremen
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