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The Digital Twin Difference - a Blueprint for the Semicondu..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Sen, Urmi
;
Gross, David
- p. 01-06 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545457
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>The Digital Twin Difference - a Blueprint for the Semiconductor Manufacturing Metaverse</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545457&Exemplar=1&LAN=DE A1 Sen, Urmi A1 Gross, David YR 2024 SN 2376-6697 K1 Performance evaluation K1 Industries K1 Geography K1 Metaverse K1 Production K1 Semiconductor device manufacture K1 Inspection SP 01 OP 06 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545457 DO https://doi.org/10.1109/ASMC61125.2024.10545457 SF ELIB - SuUB Bremen
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