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1 Ergebnisse
1
DTCO Guided Process Integration: Case Studies From FEOL & B..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Abedin, Minhaz
;
Khan, Shahrukh
;
Lanzillo, Nicholas
. - p. 1-5 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545465
RT T1
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
DTCO Guided Process Integration: Case Studies From FEOL & BEOL with BSPDN Topic: DTCO/DFM
UL https://suche.suub.uni-bremen.de/peid=ieee-10545465&Exemplar=1&LAN=DE A1 Abedin, Minhaz A1 Khan, Shahrukh A1 Lanzillo, Nicholas A1 Dechene, Dan YR 2024 SN 2376-6697 K1 Cogeneration K1 Thermal resistance K1 Metals K1 Integrated circuit interconnections K1 Logic gates K1 Semiconductor device manufacture K1 Delays K1 DTCO K1 BSPDN K1 CMOS K1 Logic K1 scaling K1 PPA SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545465 DO https://doi.org/10.1109/ASMC61125.2024.10545465 SF ELIB - SuUB Bremen
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