I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Development of Epitaxial SiGeB as a Test Vehicle to Evaluat..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Nasseri, M.
;
Durfee, C.
;
Li, J.
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545471
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Development of Epitaxial SiGeB as a Test Vehicle to Evaluate Source-Drain Etchout During Channel Release of Gate-all-Around Devices: Topic/category: AEPM: Advanced Equipment Processes and Materials</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545471&Exemplar=1&LAN=DE A1 Nasseri, M. A1 Durfee, C. A1 Li, J. A1 Sieg, K. A1 Schoeche, S. A1 Qin, L. A1 Schmidt, D. A1 Fan, S. A1 Dutta, A. A1 Loubet, N. A1 Miller, E. A1 Meli, L. YR 2024 SN 2376-6697 K1 Performance evaluation K1 Chemistry K1 Shape K1 Gallium arsenide K1 Logic gates K1 Semiconductor device manufacture K1 FinFETs SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545471 DO https://doi.org/10.1109/ASMC61125.2024.10545471 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
